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SL-90-05-4 -- HVAC Systems for Semiconductor Clean Rooms---Part 2: Total System Dynamics
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SL-90-05-4 -- HVAC Systems for Semiconductor Clean Rooms---Part 2: Total System Dynamics
Conference Proceeding by ASHRAE, 1990
Naughton, P.
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Demonstrates the unique system dynamics of seven different semiconductor clean room designs. Analyses each system for the interaction of air and water- side dynamics of the HVAC design. Includes a summary of operating costs and recommendations for efficient system operating procedures.
KEYWORDS: Clean rooms, heating ventilation, air conditioning, costs, cost in use, efficiency.
Citation: Symposium, ASHRAE Transactions, vol. 96, pt. 2, St. Louis 1990