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SL-90-05-3 -- HVAC Systems for Semiconductor Clean rooms---Part 1: System Components

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SL-90-05-3 -- HVAC Systems for Semiconductor Clean rooms---Part 1: System Components

Conference Proceeding by ASHRAE, 1990

Naughton, P.

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Full Description

Examines the major energy-using components involved in a class 10 clean room design. Includes suggestions for lower operating costs with proper selection of HVAC components.

KEYWORDS: Clean rooms, heating, selecting, ventilation, air conditioning, designing, energy conservation.

Citation: Symposium, ASHRAE Transactions, vol. 96, pt. 2, St. Louis 1990

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Published: 1990 Number of Pages: 6File Size: 1 file , 1000 KB Product Code(s): D-18701